ASTM F390-1998(2003) 用共线四探针法对金属薄膜的薄膜耐力的试验方法
作者:标准资料网
时间:2024-05-16 16:59:00
浏览:9165
来源:标准资料网
下载地址: 点击此处下载
【英文标准名称】:StandardTestMethodforSheetResistanceofThinMetallicFilmsWithaCollinearFour-ProbeArray
【原文标准名称】:用共线四探针法对金属薄膜的薄膜耐力的试验方法
【标准号】:ASTMF390-1998(2003)
【标准状态】:现行
【国别】:
【发布日期】:1998
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:F01.17
【标准类型】:(TestMethod)
【标准水平】:()
【中文主题词】:试验;电子工程;金属膜;薄板材;电阻器
【英文主题词】:collinearfour-pointprobe;electricalresistance;electricalsheetresistance;four-pointprobe;resistance;thinfilms;thinconductivefilms;thinmetallicfilms
【摘要】:1.1Thistestmethodcoversthemeasurementofthesheetresistanceofmetallicthinfilmswithacollinearfour-probearray.Itisintendedforusewithrectangularmetallicfilmsbetween0.01and100[mu]mthick,formedbydepositionofamaterialorbyathinningprocessandsupportedbyaninsulatingsubstrate,inthesheetresistancerangefrom10to10[omega]/[open-box](see3.1.3).1.2Thistestmethodissuitableforrefereemeasurementpurposesaswellasforroutineacceptancemeasurements.1.3ThevaluesstatedinSiunitsaretoberegardedasthestandard.Thevaluesgiveninparenthesesareforinformationonly.1.4Thisstandarddoesnotpurporttoaddressallofthesafetyconcerns,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.
【中国标准分类号】:L13
【国际标准分类号】:
【页数】:4P.;A4
【正文语种】:
【原文标准名称】:用共线四探针法对金属薄膜的薄膜耐力的试验方法
【标准号】:ASTMF390-1998(2003)
【标准状态】:现行
【国别】:
【发布日期】:1998
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:F01.17
【标准类型】:(TestMethod)
【标准水平】:()
【中文主题词】:试验;电子工程;金属膜;薄板材;电阻器
【英文主题词】:collinearfour-pointprobe;electricalresistance;electricalsheetresistance;four-pointprobe;resistance;thinfilms;thinconductivefilms;thinmetallicfilms
【摘要】:1.1Thistestmethodcoversthemeasurementofthesheetresistanceofmetallicthinfilmswithacollinearfour-probearray.Itisintendedforusewithrectangularmetallicfilmsbetween0.01and100[mu]mthick,formedbydepositionofamaterialorbyathinningprocessandsupportedbyaninsulatingsubstrate,inthesheetresistancerangefrom10to10[omega]/[open-box](see3.1.3).1.2Thistestmethodissuitableforrefereemeasurementpurposesaswellasforroutineacceptancemeasurements.1.3ThevaluesstatedinSiunitsaretoberegardedasthestandard.Thevaluesgiveninparenthesesareforinformationonly.1.4Thisstandarddoesnotpurporttoaddressallofthesafetyconcerns,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.
【中国标准分类号】:L13
【国际标准分类号】:
【页数】:4P.;A4
【正文语种】:
下载地址:
点击此处下载